Nā noi kikoʻī o nā mea hoʻomaʻemaʻe plasma

Hoʻokumu nā mīkini hoʻomaʻemaʻe / etching plasma i ka plasma ma o ka hoʻokomo ʻana i ʻelua electrodes i loko o kahi pahu i hoʻopaʻa ʻia e hana i kahi kahua uila. Hoʻohana ʻia kahi ʻūhā ʻūlū e mālama i kahi pae maloʻo. I ka lilo ʻana o ke kinoea i mea paʻakikī, piʻi pū ka mamao ma waena o nā molekala a me ka neʻe manuahi o nā molekala a i ʻole nā ​​​​iona. Ma lalo o ka mana o ke kahua uila, hui pū kēia mau ion a hana i ka plasma. ʻO kēia mau ion he mea hoʻoikaika loa, me ka ikehu e uhaʻi kokoke i nā mea paʻa kemika a pau, e hoʻoulu ana i nā hopena kemika ma kekahi ʻaoʻao i ʻike ʻia. Loaʻa i nā plasma kinoea like ʻole nā ​​waiwai kemika. ʻO kahi laʻana, ʻo ka plasma oxygen ka mea hoʻokahe nui loa, hiki ke hoʻokahe i ka photoresist e hana i ke kinoea, no laila e loaʻa ai kahi hopena hoʻomaʻemaʻe. He anisotropy maikaʻi loa ka plasma kino kino, e kū ana i nā koi o ka etching. Hoʻopuka ka lāʻau plasma i kahi ʻālohilohi, no laila ka inoa ʻo glow discharge.
ʻO ke ʻano o ka hoʻomaʻemaʻe plasma e hilinaʻi nui ʻia i ka "hoʻoulu" o nā mea hana i loko o ka plasma e wehe i nā ʻili. Ma ke ʻano o ke ʻano hana pane, ʻo ka hoʻomaʻemaʻe plasma ka mea maʻamau e pili ana i kēia kaʻina hana: hauʻoli nā kinoea inorganic i loko o kahi mokuʻāina plasma; hoʻopili ʻia nā mea kinoea ma luna o ka ʻili paʻa; hana nā pūʻulu adsorbed me nā molekala ma ka ʻili paʻa e hana ai i nā molekala huahana; decompose nā molekala huahana i loko o ka māhele kinoea; a hoʻoneʻe ʻia nā koena hopena mai ka ʻili.

ʻO ka hiʻohiʻona nui o ka ʻenehana hoʻomaʻemaʻe plasma ʻo ia ka hiki ke mālama i nā ʻano substrate, me nā metala, semiconductors, oxides, a me ka hapa nui o nā mea polymer e like me polypropylene, polyester, polyimide, polyvinyl chloride, epoxy, a me polytetrafluoroethylene. Hiki iā ia ke hoʻomaʻemaʻe i ka ʻili āpau a me nā wahi kikoʻī, a me nā hale paʻakikī.